ISO 23833:2013 pdf download.Microbeam analysis – Electron probe microanalysis (EPMA)一Vocabulary.
ISO 23833 defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order.
This International Standard is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of this International Standard are applicable to those documents relevant to the practices of related fields (SEM, AEM, EDX, etc.) for definition of those terms common to them.
2 Abbreviated terms
BSE backscattered electron
CRM certified reference material
EDS energy-dispersive spectrometer
EDX energy-dispersive X-ray spectrometry
EPMA electron probe microanalysis or electron probe microanalyser
eV electronvolt
keV kiloelectronvolt
RM reference material
SE secondary electron
SEM scanning electron microscope
WDS wavelength-dispersive spectrometer
WDX wavelength-dispersive X-ray spectrometry
3 Definitions of general terms used in electron probe microanalysis
3.1
electron probe microanalysis
EPMA
technique of spatially-resolved elemental analysis based upon electron-excited X-ray spectrometry with a focussed electron probe and an electron interaction volume with micrometer to sub-micrometer dimensions
3.1.1
qualitative EPMA
procedure in EPMA leading to the identification of the elements present in the electron-excited interaction volume by a sys3.1.2
quantitative EPMA
procedure leading to the assignment of numerical values to represent the concentrations of elemental constituents that had been previously identified in the electron-excited interaction volume during the qualitative analysis phase in EPMA
Note 1 to entry: Quantitative analysis can be accomplished by comparing the unknown X-ray peak intensities to X-ray peak intensities measured under the same conditions using reference material(s) or by calculating the concentration from first principles (also known as standardless analysis).
3.2
electron probe microanalyser
instrument for carrying out electron-excited X-ray microanalysis
Note 1 to entry: This instrument is usually equipped with more than one wavelength spectrometer and an optical microscope for precise specimen placement.
3.3
electron scattering
deviation in trajectory and/or kinetic energy suffered by an impinging energetic beam electron as a result of an interaction with a specimen atom or electron
3.3.1
angle of scattering scattering angle
angle between the direction of the incident particle or photon and the direction that the particle or photon is traveling after scattering
[ISO 18115-1:2010]
3.3.2
backscatteri ng
escape of beam electrons from the specimen following sufficient scattering events to cause the trajectories to intersect the entrance surface of the specimen
3.3.2.1
backscatter coefficient.tematic method for the recognition and assignment of X-ray spectral peaks to specific elements.
ISO 23833 pdf download.